ALD: Difference between revisions

Jump to navigation Jump to search
113 bytes added ,  1 December 2021
no edit summary
No edit summary
No edit summary
!Measured Thickness
!Comments
|-
|MF
|7/21/21
|NbN 300C - Plasma - Bubble - Plasma Clean
|
|
|
|-
|MF
|NbN
|40 nm
|37,39,41 nm
|2 W STM tips in holders, 5 Si chips
|-
| MF || 11/17/21 || NbN 350C - Plasma - Bubble - Plasma Clean || NbN || 40 nm
25

edits

Navigation menu