Revision as of 21:53, 1 December 2021 (view source) Mfortman2 (talk \| contribs) No edit summary Tag: Visual edit ← Older edit		Revision as of 22:05, 1 December 2021 (view source) Mfortman2 (talk \| contribs) No edit summary Tag: Visual edit Newer edit →
!Measured Thickness !Comments \|-▼ \|MF \|3/22/21 \|NbN 300C - Plasma \|NbN \|30 nm \|▼ \|3 Si chips \|-▼ \|MF \|4/7/21 \|NbN 300C - Plasma w boost \|NbN \|40 nm \| \|Error in recipe \|- \|MF \|7/21/21 \|NbN 300C - Plasma - Bubble - Plasma Clean \|NbN \|40 nm \| \|1 W STM tip in holder, 6 Si chips ▲\| ▲\| ▲\| \|- \|MF

ALD: Difference between revisions

ALD (view source)