Metal Evaporator

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To calculate Iterative Tooling Factor = Used Tooling Factor x ( Measured Thickness / Nominal Thickness) then round to nearest percent.

User Date Source Dep Rate (A/s) Current (mA) Nominal Thickness (nm) Measured Thickness (nm) Tooling Factor Used (%) Iterative Tooling Factor (%)
MF 10/27/21 Au 1.5 145 100
GH 11/10/21 Au (and 2 nm Ti) 2.0 67 122 123 77 78
GH 11/10/21 Hf <0.1 91 1.5 77
JS 11/10/21 Cr/Au/Si 1/2/2 14/60/65 2.5/30/50 (and 80) 77
MF 11/16/21 Cr/Au 0.8/1.9 13/73 4/50 77
MF 11/29/21 Au 2.1 66 75 77
GJ 1/19/22 Cr 1.0 12-13 20 77
GJ 1/21/22 Cr 1.0 15 20 77
GJ 1/28/22 Cr 1.0 17-20 20 77
MF 3/23/22 Cr/Au 1.5/2.6 10/68 4/54 77