NFC Equipment

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  • Metal Evaporator
    • For deposition of thin films of metals (most commonly used for Au)
  • RIE
    • For etching of materials (PMMA, Si, SiO2. etc)
  • EBL
    • Electron beam lithography
  • PECVD
    • Plasma enhanced chemical vapor deposition
  • ALD
    • Atomic Layer Deposition
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