PECVD

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Plasma-Therm 70 Series
User Date Recipe Material Time Nominal Thickness (nm) Measured Thickness (nm) Deposition rate Comments
MF 11/23/21 SiOxide2 SiO2 333 seconds 200nm 190 nm .57 nm/s 20211122 test sample to determine dep rate
MF 12/6/21 SiOxide2 SiO2 350 seconds 200nm 20210922A sample for Nb junctions