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! User !! Date !! Recipe !! Material !! Thickness !! Time !! Etch Rate
!Comments
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| Ex || 04/02/19 || NbEtch || Nb || 40nm || 30 s || 80 nm/m
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|-
|MF
|90
|195 s
|
|
|-
|10
|N/A Descum
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|-
|MF
|11/22/21
|NbEtch
|Nb wire
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|100 minutes
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|4 wires in Mo holder
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|MF
|12/1/21
|50CHF3
|SiO2
|<200nm
|11.75 minutes
|
|Test sample for PECVD dep rate
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