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(Created page with "{| class="wikitable" |+ Caption text |- ! User !! Date !! Recipe !! Material !! Thickness !! Time !! Etch Rate |- | Ex || 04/02/19 || NbEtch || Nb || 40nm || 30 secs || 80 nm/...") |
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{| class="wikitable"
|+Unaxis 790 RIE
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! User !! Date !! Recipe !! Material !! Thickness !! Time !! Etch Rate
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