EBL

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Caption text
User Date Resist Dose (uC/cm2) Write File Picture/Notes
MF 10/22/21 2000 bigtip_40um.dxf Pattern for etching big (40um) tip
MF 10/29/21 900 junctions_200nm.dxf 200nm break junctions
MF 11/2/21 2000 4tips_40um.dxf Pattern for etching a big tip (40um) at each corner
JS 11/8/21 950 Spun at 4000 RPM, 90 sec 180 C Bake 1500-3000 Aligned_ribbons.dxf 800 nm bars with 180 nm gaps for aligned BCP