Metal Evaporator
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To calculate Iterative Tooling Factor: ITF = Used Tooling Factor x ( Measured Thickness / Nominal Thickness)
| User | Date | Source | Dep Rate (A/s) | Current (mA) | Nominal Thickness (nm) | Measured Thickness (nm) | Tooling Factor Used (%) | Iterative Tooling Factor (%) |
|---|---|---|---|---|---|---|---|---|
| MF | 10/27/21 | Au | 1.5 | 145 | 100 | |||
| GH | 11/10/21 | Au | 2.0 | 67 | 120 | 77.0 |