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(Added column for Tooling Factor Used. Added units to column titles. Added entry from today's deposition) |
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To calculate Iterative Tooling Factor: ITF = Used Tooling Factor x ( Measured Thickness / Nominal Thickness)
{| class="wikitable"
|-
! User !! Date !! Source !! Dep Rate (A/s) !! Current (mA) !! Nominal Thickness (nm) !! Measured Thickness (nm)
!
!Iterative Tooling Factor (%)
|-
| MF || 10/27/21 || Au || 1.5
|
|
|-
|GH
|11/10/21
|Au
|2.0
|67
|120
|
|77.0
|
|}
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