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- 21:39, 1 December 2021 ALD (hist | edit) [766 bytes] Mfortman2 (talk | contribs) (Created page with "{| class="wikitable" |+Unaxis 790 RIE |- ! User !! Date !! Recipe !! Material !! Thickness !! Time !! Etch Rate !Comments |- | Ex || 04/02/19 || NbEtch || Nb || 40nm || 30 s |...")
- 21:34, 1 December 2021 PECVD (hist | edit) [386 bytes] Mfortman2 (talk | contribs) (Created page with "{| class="wikitable" |+Unaxis 790 RIE |- ! User !! Date !! Recipe !! Material !! Thickness !! Time !! Etch Rate !Comments |- | Ex || 04/02/19 || NbEtch || Nb || 40nm || 30 s |...")