RIE

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Unaxis 790 RIE
User	Date	Recipe	Material	Thickness	Time	Etch Rate
Ex	04/02/19	NbEtch	Nb	40nm	30 s	80 nm/m
MF	10/27/21	NbEtch	Nb on junctions	90	195 s
JS	11/10/21	50_10_10	PMMA/Neutral Layer/Graphene/SiO2/Si		10	N/A Descum

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