RIE
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User | Date | Recipe | Material | Thickness | Time | Etch Rate |
---|---|---|---|---|---|---|
Ex | 04/02/19 | NbEtch | Nb | 40nm | 30 secs | 80 nm/m |
User | Date | Recipe | Material | Thickness | Time | Etch Rate |
---|---|---|---|---|---|---|
Ex | 04/02/19 | NbEtch | Nb | 40nm | 30 secs | 80 nm/m |