ALD
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| User | Date | Recipe | Material | Nominal Thickness | Measured Thickness | Comments |
|---|---|---|---|---|---|---|
| MF | 3/22/21 | NbN 300C - Plasma | NbN | 30 nm | 3 Si chips | |
| MF | 4/7/21 | NbN 300C - Plasma w boost | NbN | 40 nm | Error in recipe | |
| MF | 7/21/21 | NbN 300C - Plasma - Bubble - Plasma Clean | NbN | 40 nm | 1 W STM tip in holder, 6 Si chips | |
| MF | 8/23/21 | NbN 350C - Plasma - Bubble - Plasma Clean | NbN | 40 nm | 37,39,41 nm | 2 W STM tips in holders, 5 Si chips |
| MF | 11/17/21 | NbN 350C - Plasma - Bubble - Plasma Clean | NbN | 40 nm | 39-43 nm | 4 tips chip, PtIr STM tip in holder (masked to electrically isolate), 5 Si chips |
| MF | 12/2/21 | NbN 350C - Plasma - Bubble - Plasma Clean | NbN | 40 nm | 2 13x13mm Si chips, etc. |