ALD: Difference between revisions
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!Measured Thickness |
!Measured Thickness |
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!Comments |
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|MF |
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|7/21/21 |
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|NbN 300C - Plasma - Bubble - Plasma Clean |
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|MF |
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|NbN |
|NbN |
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|40 nm |
|40 nm |
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|37,39,41 nm |
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|2 W STM tips in holders, 5 Si chips |
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| MF || 11/17/21 || NbN 350C - Plasma - Bubble - Plasma Clean || NbN || 40 nm |
| MF || 11/17/21 || NbN 350C - Plasma - Bubble - Plasma Clean || NbN || 40 nm |
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Revision as of 21:53, 1 December 2021
| User | Date | Recipe | Material | Nominal Thickness | Measured Thickness | Comments |
|---|---|---|---|---|---|---|
| MF | 7/21/21 | NbN 300C - Plasma - Bubble - Plasma Clean | ||||
| MF | 8/23/21 | NbN 350C - Plasma - Bubble - Plasma Clean | NbN | 40 nm | 37,39,41 nm | 2 W STM tips in holders, 5 Si chips |
| MF | 11/17/21 | NbN 350C - Plasma - Bubble - Plasma Clean | NbN | 40 nm | 39-43 nm | 4 tips chip, PtIr STM tip in holder (masked to electrically isolate), 5 Si chips |