EBL: Difference between revisions
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| MF || 10/22/21 |
| MF || 10/22/21 |
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| || 2000 || bigtip_40um.dxf || Pattern for etching big (40um) tip |
| 950 spun at 4000RPM, 60s 180C bake|| 2000 || bigtip_40um.dxf || Pattern for etching big (40um) tip |
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|MF |
|MF |
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|10/29/21 |
|10/29/21 |
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|Bilayer 495/950, 1800RPM, 60s 180C bake |
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| ⚫ | |||
|900 |
|900 |
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|junctions_200nm.dxf |
|junctions_200nm.dxf |
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|MF |
|MF |
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|11/2/21 |
|11/2/21 |
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|950 spun at 4000RPM, 60s 180C bake |
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| ⚫ | |||
|2000 |
|2000 |
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|4tips_40um.dxf |
|4tips_40um.dxf |
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| Line 28: | Line 28: | ||
|Aligned_ribbons.dxf |
|Aligned_ribbons.dxf |
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|800 nm bars with 180 nm gaps for aligned BCP |
|800 nm bars with 180 nm gaps for aligned BCP |
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| ⚫ | |||
|MF |
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|11/10/21 |
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|Bilayer 495/950, 1800RPM, 60s 180C bake |
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|900 |
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|junctions_200nm.dxf |
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|200nm break junctions |
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|JS |
|JS |
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|SiN_40nm_Thermal_Wires |
|SiN_40nm_Thermal_Wires |
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|40 nm wires with 2 micron gaps for SiN thermal steerer |
|40 nm wires with 2 micron gaps for SiN thermal steerer |
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| ⚫ | |||
|MF |
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|11/16/21 |
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|Bilayer 495/950, 1800RPM, 60s 180C bake |
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|900 |
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|junctionswshorts2.dxf |
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|200nm break junctions w shorts on one side |
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|- |
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|MF |
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|11/29/21 |
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|Bilayer 495/950, 1800RPM, 60s 180C bake |
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|900 |
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|junctionswshorts_bottom2c.dxf & junctionswshorts_top1.dxf |
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|Redo one from 11/16/21 |
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|- |
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|MF |
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|11/30/21 |
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|Bilayer 495/950, 1800RPM, 60s 180C bake |
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|900 |
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|junctionswshorts_bottom2c.dxf & junctionswshorts_top1.dxf |
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|Redo other from 11/16/21 |
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Revision as of 21:30, 1 December 2021
| User | Date | Resist | Dose (uC/cm2) | Write File | Picture/Notes |
|---|---|---|---|---|---|
| MF | 10/22/21 | 950 spun at 4000RPM, 60s 180C bake | 2000 | bigtip_40um.dxf | Pattern for etching big (40um) tip |
| MF | 10/29/21 | Bilayer 495/950, 1800RPM, 60s 180C bake | 900 | junctions_200nm.dxf | 200nm break junctions |
| MF | 11/2/21 | 950 spun at 4000RPM, 60s 180C bake | 2000 | 4tips_40um.dxf | Pattern for etching a big tip (40um) at each corner |
| JS | 11/8/21 | 950 Spun at 4000 RPM, 90 sec 180 C Bake | 1500-3000 | Aligned_ribbons.dxf | 800 nm bars with 180 nm gaps for aligned BCP |
| MF | 11/10/21 | Bilayer 495/950, 1800RPM, 60s 180C bake | 900 | junctions_200nm.dxf | 200nm break junctions |
| JS | 11/11/21 | HSiQ: 3000 RPM | 1150 | SiN_40nm_Thermal_Wires | 40 nm wires with 2 micron gaps for SiN thermal steerer |
| MF | 11/16/21 | Bilayer 495/950, 1800RPM, 60s 180C bake | 900 | junctionswshorts2.dxf | 200nm break junctions w shorts on one side |
| MF | 11/29/21 | Bilayer 495/950, 1800RPM, 60s 180C bake | 900 | junctionswshorts_bottom2c.dxf & junctionswshorts_top1.dxf | Redo one from 11/16/21 |
| MF | 11/30/21 | Bilayer 495/950, 1800RPM, 60s 180C bake | 900 | junctionswshorts_bottom2c.dxf & junctionswshorts_top1.dxf | Redo other from 11/16/21 |