EBL: Difference between revisions
Jump to navigation
Jump to search
mNo edit summary |
No edit summary |
||
| Line 28: | Line 28: | ||
|Aligned_ribbons.dxf |
|Aligned_ribbons.dxf |
||
|800 nm bars with 180 nm gaps for aligned BCP |
|800 nm bars with 180 nm gaps for aligned BCP |
||
|- |
|||
|JS |
|||
|11/11/21 |
|||
|HSiQ: 3000 RPM |
|||
|1150 |
|||
|SiN_40nm_Thermal_Wires |
|||
|40 nm wires with 2 micron gaps for SiN thermal steerer |
|||
|} |
|} |
||
Revision as of 17:07, 11 November 2021
| User | Date | Resist | Dose (uC/cm2) | Write File | Picture/Notes |
|---|---|---|---|---|---|
| MF | 10/22/21 | 2000 | bigtip_40um.dxf | Pattern for etching big (40um) tip | |
| MF | 10/29/21 | 900 | junctions_200nm.dxf | 200nm break junctions | |
| MF | 11/2/21 | 2000 | 4tips_40um.dxf | Pattern for etching a big tip (40um) at each corner | |
| JS | 11/8/21 | 950 Spun at 4000 RPM, 90 sec 180 C Bake | 1500-3000 | Aligned_ribbons.dxf | 800 nm bars with 180 nm gaps for aligned BCP |
| JS | 11/11/21 | HSiQ: 3000 RPM | 1150 | SiN_40nm_Thermal_Wires | 40 nm wires with 2 micron gaps for SiN thermal steerer |