EBL: Difference between revisions
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|+ Caption text |
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! User !! Date |
! User !! Date |
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!Resist!! Dose (uC/cm2) !! Write File !! Picture/Notes |
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| MF || 10/22/21 |
| MF || 10/22/21 |
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| || 2000 || bigtip_40um.dxf || Pattern for etching big (40um) tip |
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|MF |
|MF |
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|10/29/21 |
|10/29/21 |
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|900 |
|900 |
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|junctions_200nm.dxf |
|junctions_200nm.dxf |
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|MF |
|MF |
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|11/2/21 |
|11/2/21 |
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|2000 |
|2000 |
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|4tips_40um.dxf |
|4tips_40um.dxf |
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|Pattern for etching a big tip (40um) at each corner |
|Pattern for etching a big tip (40um) at each corner |
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|JS |
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|11/8/21 |
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|950 Spun at 4000 RPM, 90 sec 180 C Bake |
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|1500-3000 |
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|Aligned_ribbons.dxf |
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|800 nm bars with 180 nm gaps for aligned BCP |
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Revision as of 17:02, 10 November 2021
| User | Date | Resist | Dose (uC/cm2) | Write File | Picture/Notes |
|---|---|---|---|---|---|
| MF | 10/22/21 | 2000 | bigtip_40um.dxf | Pattern for etching big (40um) tip | |
| MF | 10/29/21 | 900 | junctions_200nm.dxf | 200nm break junctions | |
| MF | 11/2/21 | 2000 | 4tips_40um.dxf | Pattern for etching a big tip (40um) at each corner | |
| JS | 11/8/21 | 950 Spun at 4000 RPM, 90 sec 180 C Bake | 1500-3000 | Aligned_ribbons.dxf | 800 nm bars with 180 nm gaps for aligned BCP |