RIE: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
No edit summary |
||
| Line 4: | Line 4: | ||
! User !! Date !! Recipe !! Material !! Thickness !! Time !! Etch Rate |
! User !! Date !! Recipe !! Material !! Thickness !! Time !! Etch Rate |
||
|- |
|- |
||
| Ex || 04/02/19 || NbEtch || Nb || 40nm || 30 |
| Ex || 04/02/19 || NbEtch || Nb || 40nm || 30 s || 80 nm/m |
||
|- |
|||
|MF |
|||
|10/27/21 |
|||
|NbEtch |
|||
|Nb on junctions |
|||
|90 |
|||
|195 s |
|||
| |
|||
|- |
|- |
||
|} |
|} |
||
Revision as of 16:36, 27 October 2021
| User | Date | Recipe | Material | Thickness | Time | Etch Rate |
|---|---|---|---|---|---|---|
| Ex | 04/02/19 | NbEtch | Nb | 40nm | 30 s | 80 nm/m |
| MF | 10/27/21 | NbEtch | Nb on junctions | 90 | 195 s |