NFC Equipment: Difference between revisions
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(starting nfc equipment list) |
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* [[RIE]] |
* [[RIE]] |
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** For etching of materials (PMMA, Si, SiO2. etc) |
** For etching of materials (PMMA, Si, SiO2. etc) |
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* [[EBL]] |
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** Electron beam lithography |
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Revision as of 20:01, 4 October 2021
- Metal Evaporator
- For deposition of thin films of metals (most commonly used for Au)