Metal Evaporator: Difference between revisions
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(Add Hf deposition) |
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|1.5 |
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|JF |
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|11/10/21 |
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|Cr/Au/Si |
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|1/2/2 |
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|14/60/65 |
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|2.5/30/50 (and 80) |
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|77 |
|77 |
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Revision as of 14:57, 11 November 2021
To calculate Iterative Tooling Factor = Used Tooling Factor x ( Measured Thickness / Nominal Thickness) then round to nearest percent.
| User | Date | Source | Dep Rate (A/s) | Current (mA) | Nominal Thickness (nm) | Measured Thickness (nm) | Tooling Factor Used (%) | Iterative Tooling Factor (%) |
|---|---|---|---|---|---|---|---|---|
| MF | 10/27/21 | Au | 1.5 | 145 | 100 | |||
| GH | 11/10/21 | Au (and 2 nm Ti) | 2.0 | 67 | 122 | 123 | 77 | 78 |
| GH | 11/10/21 | Hf | <0.1 | 91 | 1.5 | 77 | ||
| JF | 11/10/21 | Cr/Au/Si | 1/2/2 | 14/60/65 | 2.5/30/50 (and 80) | 77 |