Metal Evaporator: Difference between revisions
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(Added measurement of Au/Ti and ITF) |
(Add Hf deposition) |
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Revision as of 20:35, 10 November 2021
To calculate Iterative Tooling Factor = Used Tooling Factor x ( Measured Thickness / Nominal Thickness) then round to nearest percent.
| User | Date | Source | Dep Rate (A/s) | Current (mA) | Nominal Thickness (nm) | Measured Thickness (nm) | Tooling Factor Used (%) | Iterative Tooling Factor (%) |
|---|---|---|---|---|---|---|---|---|
| MF | 10/27/21 | Au | 1.5 | 145 | 100 | |||
| GH | 11/10/21 | Au (and 2 nm Ti) | 2.0 | 67 | 122 | 123 | 77 | 78 |
| GH | 11/10/21 | Hf | <0.1 | 91 | 1.5 | 77 |