Metal Evaporator: Difference between revisions
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(Added column for Tooling Factor Used. Added units to column titles. Added entry from today's deposition) |
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To calculate Iterative Tooling Factor: ITF = Used Tooling Factor x ( Measured Thickness / Nominal Thickness) |
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! User !! Date !! Source !! Dep Rate !! Current !! Nominal Thickness !! Measured Thickness |
! User !! Date !! Source !! Dep Rate (A/s) !! Current (mA) !! Nominal Thickness (nm) !! Measured Thickness (nm) |
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! |
!Tooling Factor Used (%) |
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!Iterative Tooling Factor (%) |
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| MF || 10/27/21 || Au || 1.5 |
| MF || 10/27/21 || Au || 1.5 || 145 || 100 || |
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|GH |
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|11/10/21 |
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|Au |
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|2.0 |
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|67 |
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|120 |
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|77.0 |
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Revision as of 17:01, 10 November 2021
To calculate Iterative Tooling Factor: ITF = Used Tooling Factor x ( Measured Thickness / Nominal Thickness)
| User | Date | Source | Dep Rate (A/s) | Current (mA) | Nominal Thickness (nm) | Measured Thickness (nm) | Tooling Factor Used (%) | Iterative Tooling Factor (%) |
|---|---|---|---|---|---|---|---|---|
| MF | 10/27/21 | Au | 1.5 | 145 | 100 | |||
| GH | 11/10/21 | Au | 2.0 | 67 | 120 | 77.0 |