Metal Evaporator: Difference between revisions
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! User !! Date !! Source !! Dep Rate !! Current !! Nominal Thickness !! Measured Thickness |
! User !! Date !! Source !! Dep Rate !! Current !! Nominal Thickness !! Measured Thickness |
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!Iterative Tooling Factor |
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| MF || 10/27/21 || Au || 1.5 A/s || 145mA || 100nm || |
| MF || 10/27/21 || Au || 1.5 A/s || 145mA || 100nm || |
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Revision as of 16:07, 5 November 2021
| User | Date | Source | Dep Rate | Current | Nominal Thickness | Measured Thickness | Iterative Tooling Factor |
|---|---|---|---|---|---|---|---|
| MF | 10/27/21 | Au | 1.5 A/s | 145mA | 100nm |