RIE: Difference between revisions
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(Created page with "{| class="wikitable" |+ Caption text |- ! User !! Date !! Recipe !! Material !! Thickness !! Time !! Etch Rate |- | Ex || 04/02/19 || NbEtch || Nb || 40nm || 30 secs || 80 nm/...") |
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! User !! Date !! Recipe !! Material !! Thickness !! Time !! Etch Rate |
! User !! Date !! Recipe !! Material !! Thickness !! Time !! Etch Rate |
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Revision as of 16:22, 27 October 2021
| User | Date | Recipe | Material | Thickness | Time | Etch Rate |
|---|---|---|---|---|---|---|
| Ex | 04/02/19 | NbEtch | Nb | 40nm | 30 secs | 80 nm/m |