ALD: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
No edit summary |
||
| (2 intermediate revisions by the same user not shown) | |||
| Line 7: | Line 7: | ||
|- |
|- |
||
|MF |
|MF |
||
| |
|3/22/21 |
||
|NbN |
|NbN 300C - Plasma |
||
|NbN |
|||
|30 nm |
|||
| |
|||
|3 Si chips |
|||
|- |
|||
|MF |
|||
|4/7/21 |
|||
|NbN 300C - Plasma w boost |
|||
|NbN |
|NbN |
||
|40 nm |
|40 nm |
||
| |
| |
||
|Error in recipe |
|||
|- |
|||
|MF |
|||
|7/21/21 |
|||
|NbN 300C - Plasma - Bubble - Plasma Clean |
|||
|NbN |
|||
|40 nm |
|||
| |
| |
||
|1 W STM tip in holder, 6 Si chips |
|||
|- |
|||
|MF |
|||
|8/23/21 |
|||
|NbN 350C - Plasma - Bubble - Plasma Clean |
|||
|NbN |
|||
|40 nm |
|||
|37,39,41 nm |
|||
|2 W STM tips in holders, 5 Si chips |
|||
|- |
|- |
||
| MF || 11/17/21 || NbN 350C - Plasma - Bubble - Plasma Clean || NbN || 40 nm |
| MF || 11/17/21 || NbN 350C - Plasma - Bubble - Plasma Clean || NbN || 40 nm |
||
|39-43 nm |
|39-43 nm |
||
|4 tips chip, PtIr STM tip in holder (masked to electrically isolate), 5 Si chips |
|4 tips chip, PtIr STM tip in holder (masked to electrically isolate), 5 Si chips |
||
|- |
|||
|MF |
|||
|12/2/21 |
|||
|NbN 350C - Plasma - Bubble - Plasma Clean |
|||
|NbN |
|||
|40 nm |
|||
| |
|||
|2 13x13mm Si chips, etc. |
|||
|- |
|- |
||
|} |
|} |
||
Latest revision as of 21:35, 2 December 2021
| User | Date | Recipe | Material | Nominal Thickness | Measured Thickness | Comments |
|---|---|---|---|---|---|---|
| MF | 3/22/21 | NbN 300C - Plasma | NbN | 30 nm | 3 Si chips | |
| MF | 4/7/21 | NbN 300C - Plasma w boost | NbN | 40 nm | Error in recipe | |
| MF | 7/21/21 | NbN 300C - Plasma - Bubble - Plasma Clean | NbN | 40 nm | 1 W STM tip in holder, 6 Si chips | |
| MF | 8/23/21 | NbN 350C - Plasma - Bubble - Plasma Clean | NbN | 40 nm | 37,39,41 nm | 2 W STM tips in holders, 5 Si chips |
| MF | 11/17/21 | NbN 350C - Plasma - Bubble - Plasma Clean | NbN | 40 nm | 39-43 nm | 4 tips chip, PtIr STM tip in holder (masked to electrically isolate), 5 Si chips |
| MF | 12/2/21 | NbN 350C - Plasma - Bubble - Plasma Clean | NbN | 40 nm | 2 13x13mm Si chips, etc. |