Metal Evaporator: Difference between revisions

From brarlab
Jump to navigation Jump to search
(Added measurement of Au/Ti and ITF)
No edit summary
 
(6 intermediate revisions by 4 users not shown)
Line 19: Line 19:
|77
|77
|78
|78
|-
|GH
|11/10/21
|Hf
|<0.1
|91
|1.5
|
|77
|
|-
|JS
|11/10/21
|Cr/Au/Si
|1/2/2
|14/60/65
|2.5/30/50 (and 80)
|
|77
|
|-
|MF
|11/16/21
|Cr/Au
|0.8/1.9
|13/73
|4/50
|
|77
|
|-
|MF
|11/29/21
|Au
|2.1
|66
|75
|
|77
|
|-
|GJ
|1/19/22
|Cr
|1.0
|12-13
|20
|
|77
|
|-
|GJ
|1/21/22
|Cr
|1.0
|15
|20
|
|77
|
|-
|GJ
|1/28/22
|Cr
|1.0
|17-20
|20
|
|77
|
|-
|MF
|3/23/22
|Cr/Au
|1.5/2.6
|10/68
|4/54
|
|77
|
|}
|}

Latest revision as of 15:51, 23 March 2022

To calculate Iterative Tooling Factor = Used Tooling Factor x ( Measured Thickness / Nominal Thickness) then round to nearest percent.

User Date Source Dep Rate (A/s) Current (mA) Nominal Thickness (nm) Measured Thickness (nm) Tooling Factor Used (%) Iterative Tooling Factor (%)
MF 10/27/21 Au 1.5 145 100
GH 11/10/21 Au (and 2 nm Ti) 2.0 67 122 123 77 78
GH 11/10/21 Hf <0.1 91 1.5 77
JS 11/10/21 Cr/Au/Si 1/2/2 14/60/65 2.5/30/50 (and 80) 77
MF 11/16/21 Cr/Au 0.8/1.9 13/73 4/50 77
MF 11/29/21 Au 2.1 66 75 77
GJ 1/19/22 Cr 1.0 12-13 20 77
GJ 1/21/22 Cr 1.0 15 20 77
GJ 1/28/22 Cr 1.0 17-20 20 77
MF 3/23/22 Cr/Au 1.5/2.6 10/68 4/54 77