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Metal Evaporator: Difference between revisions
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To calculate Iterative Tooling Factor = Used Tooling Factor x ( Measured Thickness / Nominal Thickness) then round to nearest percent.
{| class="wikitable"
|-
! User !! Date !! Source !! Dep Rate (A/s) !! Current (mA) !! Nominal Thickness (nm) !! Measured Thickness (nm)
!Tooling Factor Used (%)
!Iterative Tooling Factor (%)
|-
| MF || 10/27/21 || Au || 1.5
|
|
|-
|GH
|11/10/21
|Au (and 2 nm Ti)
|2.0
|67
|122
|123
|77
|78
|-
|GH
|11/10/21
|Hf
|<0.1
|91
|1.5
|
|77
|
|-
|JS
|11/10/21
|Cr/Au/Si
|1/2/2
|14/60/65
|2.5/30/50 (and 80)
|
|77
|
|-
|MF
|11/16/21
|Cr/Au
|0.8/1.9
|13/73
|4/50
|
|77
|
|-
|MF
|11/29/21
|Au
|2.1
|66
|75
|
|77
|
|-
|GJ
|1/19/22
|Cr
|1.0
|12-13
|20
|
|77
|
|-
|GJ
|1/21/22
|Cr
|1.0
|15
|20
|
|77
|
|-
|GJ
|1/28/22
|Cr
|1.0
|17-20
|20
|
|77
|
|-
|MF
|3/23/22
|Cr/Au
|1.5/2.6
|10/68
|4/54
|
|77
|
|}
| |||