Metal Evaporator: Difference between revisions
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To calculate Iterative Tooling Factor = Used Tooling Factor x ( Measured Thickness / Nominal Thickness) then round to nearest percent. |
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{| class="wikitable" |
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! User !! Date !! Source !! Dep Rate !! Current !! Nominal Thickness !! Measured Thickness |
! User !! Date !! Source !! Dep Rate (A/s) !! Current (mA) !! Nominal Thickness (nm) !! Measured Thickness (nm) |
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!Tooling Factor Used (%) |
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!Iterative Tooling Factor (%) |
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| MF || 10/27/21 || Au || 1.5 |
| MF || 10/27/21 || Au || 1.5 || 145 || 100 || |
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|GH |
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|11/10/21 |
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|Au (and 2 nm Ti) |
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|2.0 |
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|67 |
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|122 |
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|123 |
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|77 |
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|78 |
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|GH |
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|11/10/21 |
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|Hf |
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|<0.1 |
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|91 |
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|1.5 |
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|77 |
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|JS |
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|11/10/21 |
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|Cr/Au/Si |
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|1/2/2 |
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|14/60/65 |
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|2.5/30/50 (and 80) |
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|77 |
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|MF |
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|11/16/21 |
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|Cr/Au |
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|0.8/1.9 |
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|13/73 |
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|4/50 |
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|77 |
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|MF |
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|11/29/21 |
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|Au |
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|2.1 |
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|66 |
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|75 |
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|77 |
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|GJ |
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|1/19/22 |
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|Cr |
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|1.0 |
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|12-13 |
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|20 |
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|77 |
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|GJ |
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|1/21/22 |
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|Cr |
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|1.0 |
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|15 |
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|20 |
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|77 |
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|GJ |
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|1/28/22 |
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|Cr |
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|1.0 |
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|17-20 |
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|20 |
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|77 |
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|MF |
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|3/23/22 |
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|Cr/Au |
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|1.5/2.6 |
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|10/68 |
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|4/54 |
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|77 |
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Latest revision as of 15:51, 23 March 2022
To calculate Iterative Tooling Factor = Used Tooling Factor x ( Measured Thickness / Nominal Thickness) then round to nearest percent.
| User | Date | Source | Dep Rate (A/s) | Current (mA) | Nominal Thickness (nm) | Measured Thickness (nm) | Tooling Factor Used (%) | Iterative Tooling Factor (%) |
|---|---|---|---|---|---|---|---|---|
| MF | 10/27/21 | Au | 1.5 | 145 | 100 | |||
| GH | 11/10/21 | Au (and 2 nm Ti) | 2.0 | 67 | 122 | 123 | 77 | 78 |
| GH | 11/10/21 | Hf | <0.1 | 91 | 1.5 | 77 | ||
| JS | 11/10/21 | Cr/Au/Si | 1/2/2 | 14/60/65 | 2.5/30/50 (and 80) | 77 | ||
| MF | 11/16/21 | Cr/Au | 0.8/1.9 | 13/73 | 4/50 | 77 | ||
| MF | 11/29/21 | Au | 2.1 | 66 | 75 | 77 | ||
| GJ | 1/19/22 | Cr | 1.0 | 12-13 | 20 | 77 | ||
| GJ | 1/21/22 | Cr | 1.0 | 15 | 20 | 77 | ||
| GJ | 1/28/22 | Cr | 1.0 | 17-20 | 20 | 77 | ||
| MF | 3/23/22 | Cr/Au | 1.5/2.6 | 10/68 | 4/54 | 77 |