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!Measured Thickness
!Comments
|-▼
|MF
|3/22/21
|NbN 300C - Plasma
|NbN
|30 nm
|▼
|3 Si chips
|-▼
|MF
|4/7/21
|NbN 300C - Plasma w boost
|NbN
|40 nm
|
|Error in recipe
|-
|MF
|7/21/21
|NbN 300C - Plasma - Bubble - Plasma Clean
|NbN
|40 nm
|
|1 W STM tip in holder, 6 Si chips
▲|
▲|
▲|
|-
|MF
|39-43 nm
|4 tips chip, PtIr STM tip in holder (masked to electrically isolate), 5 Si chips
|-
|MF
|12/2/21
|NbN 350C - Plasma - Bubble - Plasma Clean
|NbN
|40 nm
|
|2 13x13mm Si chips, etc.
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