25
edits
ALD: Difference between revisions
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|MF
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|NbN
|NbN
|30 nm
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|3 Si chips
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|MF
|4/7/21
|NbN 300C - Plasma w boost
|NbN
|40 nm
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|Error in recipe
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|MF
|7/21/21
|NbN 300C - Plasma - Bubble - Plasma Clean
|NbN
|40 nm
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|1 W STM tip in holder, 6 Si chips
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|MF
|8/23/21
|NbN 350C - Plasma - Bubble - Plasma Clean
|NbN
|40 nm
|37,39,41 nm
|2 W STM tips in holders, 5 Si chips
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| MF || 11/17/21 || NbN 350C - Plasma - Bubble - Plasma Clean || NbN || 40 nm
|39-43 nm
|4 tips chip, PtIr STM tip in holder (masked to electrically isolate), 5 Si chips
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|MF
|12/2/21
|NbN 350C - Plasma - Bubble - Plasma Clean
|NbN
|40 nm
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|2 13x13mm Si chips, etc.
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