NFC Equipment: Difference between revisions

NFC Equipment (view source)

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Revision as of 18:33, 4 October 2021 (view source) Siegel8 (talk \| contribs) (starting nfc equipment list) Tag: Visual edit		Latest revision as of 21:39, 1 December 2021 (view source) Mfortman2 (talk \| contribs) No edit summary
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* [[RIE]] ** For etching of materials (PMMA, Si, SiO2. etc) * [[EBL]] ** Electron beam lithography * [[PECVD]] ** Plasma enhanced chemical vapor deposition * [[ALD]] ** Atomic Layer Deposition