EBL - Revision history

Gjaffe at 16:43, 28 January 2022

2022-01-28T16:43:20Z

← Older revision		Revision as of 16:43, 28 January 2022
Line 79:		Line 79:
	p5580_reduced_1x1mm_pec.cel		p5580_reduced_1x1mm_pec.cel
	\|Repeated dose array in smaller range and reduced feature sizes to combat feature blowout		\|Repeated dose array in smaller range and reduced feature sizes to combat feature blowout
			\|-
			\|GJ
			\|1/27/22
			\|Bilayer 495A4/950A4, 4k RPM 60s, 180C bake 90s
			\|1300
			\|p4720_reduced_4x4mm_pec.cel
			\|4x4mm thermal emitter pattern on sample MW2 Box 2 D2. Pattern was somehow written shifted by 2mm in x and y
	\|}		\|}

Gjaffe at 18:19, 21 January 2022

2022-01-21T18:19:37Z

@@ Line 3: / Line 3: @@
 |-
 ! User !! Date
-!Resist!! Dose (uC/cm2) !! Write File !! Picture/Notes
+!Resist!! Dose (µC/cm<sup>2</sup>) !! Write File !! Picture/Notes
 |-
 | MF || 10/22/21
@@ Line 63: / Line 63: @@
 |junctionswshorts_bottom2c.dxf & junctionswshorts_top1.dxf
 |Redo other from 11/16/21
 |}

Mfortman2 at 21:30, 1 December 2021

2021-12-01T21:30:43Z

@@ Line 6: / Line 6: @@
 |-
 | MF || 10/22/21
-| || 2000 || bigtip_40um.dxf || Pattern for etching big (40um) tip
+| 950 spun at 4000RPM, 60s 180C bake|| 2000 || bigtip_40um.dxf || Pattern for etching big (40um) tip
 |-
 |MF
 |10/29/21
 |900
 |junctions_200nm.dxf
@@ Line 17: / Line 17: @@
 |MF
 |11/2/21
 |2000
 |4tips_40um.dxf
@@ Line 28: / Line 28: @@
 |Aligned_ribbons.dxf
 |800 nm bars with 180 nm gaps for aligned BCP
 |-
 |JS
@@ Line 35: / Line 42: @@
 |SiN_40nm_Thermal_Wires
 |40 nm wires with 2 micron gaps for SiN thermal steerer
 |}

Siegel8 at 17:07, 11 November 2021

2021-11-11T17:07:30Z

← Older revision		Revision as of 17:07, 11 November 2021
Line 28:		Line 28:
	\|Aligned_ribbons.dxf		\|Aligned_ribbons.dxf
	\|800 nm bars with 180 nm gaps for aligned BCP		\|800 nm bars with 180 nm gaps for aligned BCP
			\|-
			\|JS
			\|11/11/21
			\|HSiQ: 3000 RPM
			\|1150
			\|SiN_40nm_Thermal_Wires
			\|40 nm wires with 2 micron gaps for SiN thermal steerer
	\|}		\|}

Siegel8 at 17:02, 10 November 2021

2021-11-10T17:02:31Z

← Older revision		Revision as of 17:02, 10 November 2021
Line 2:		Line 2:
	\|+ Caption text		\|+ Caption text
	\|-		\|-
	! User !! Date ~~!! Dose (uC/cm2) !! Write File !! Picture/Notes~~		! User !! Date
			!Resist!! Dose (uC/cm2) !! Write File !! Picture/Notes
	\|-		\|-
	\| MF \|\| 10/22/21 ~~\|\| 2000 \|\| bigtip_40um.dxf \|\| Pattern for etching big (40um) tip~~		\| MF \|\| 10/22/21
			\| \|\| 2000 \|\| bigtip_40um.dxf \|\| Pattern for etching big (40um) tip
	\|-		\|-
	\|MF		\|MF
	\|10/29/21		\|10/29/21
			\|
	\|900		\|900
	\|junctions_200nm.dxf		\|junctions_200nm.dxf
Line 14:		Line 17:
	\|MF		\|MF
	\|11/2/21		\|11/2/21
			\|
	\|2000		\|2000
	\|4tips_40um.dxf		\|4tips_40um.dxf
	\|Pattern for etching a big tip (40um) at each corner		\|Pattern for etching a big tip (40um) at each corner
			\|-
			\|JS
			\|11/8/21
			\|950 Spun at 4000 RPM, 90 sec 180 C Bake
			\|1500-3000
			\|Aligned_ribbons.dxf
			\|800 nm bars with 180 nm gaps for aligned BCP
	\|}		\|}

Mfortman2 at 03:04, 3 November 2021

2021-11-03T03:04:39Z

← Older revision		Revision as of 03:04, 3 November 2021
Line 11:		Line 11:
	\|junctions_200nm.dxf		\|junctions_200nm.dxf
	\|200nm break junctions		\|200nm break junctions
			\|-
			\|MF
			\|11/2/21
			\|2000
			\|4tips_40um.dxf
			\|Pattern for etching a big tip (40um) at each corner
	\|}		\|}

Mfortman2 at 14:56, 29 October 2021

2021-10-29T14:56:50Z

← Older revision		Revision as of 14:56, 29 October 2021
Line 5:		Line 5:
	\|-		\|-
	\| MF \|\| 10/22/21 \|\| 2000 \|\| bigtip_40um.dxf \|\| Pattern for etching big (40um) tip		\| MF \|\| 10/22/21 \|\| 2000 \|\| bigtip_40um.dxf \|\| Pattern for etching big (40um) tip
			\|-
			\|MF
			\|10/29/21
			\|900
			\|junctions_200nm.dxf
			\|200nm break junctions
	\|}		\|}

Mfortman2 at 16:29, 27 October 2021

2021-10-27T16:29:29Z

← Older revision		Revision as of 16:29, 27 October 2021
Line 5:		Line 5:
	\|-		\|-
	\| MF \|\| 10/22/21 \|\| 2000 \|\| bigtip_40um.dxf \|\| Pattern for etching big (40um) tip		\| MF \|\| 10/22/21 \|\| 2000 \|\| bigtip_40um.dxf \|\| Pattern for etching big (40um) tip
	\|-
	\| Example \|\| Example \|\| Example \|\| Example \|\| Example
	\|-
	\| Example \|\| Example \|\| Example \|\| Example \|\| Example
	\|}		\|}

Mfortman2: Created page with "{| class="wikitable" |+ Caption text |- ! User !! Date !! Dose (uC/cm2) !! Write File !! Picture/Notes |- | MF || 10/22/21 || 2000 || bigtip_40um.dxf || Pattern for etching bi..."

2021-10-27T16:28:54Z

Created page with "{| class="wikitable" |+ Caption text |- ! User !! Date !! Dose (uC/cm2) !! Write File !! Picture/Notes |- | MF || 10/22/21 || 2000 || bigtip_40um.dxf || Pattern for etching bi..."

New page

{| class="wikitable"
|+ Caption text
|-
! User !! Date !! Dose (uC/cm2) !! Write File !! Picture/Notes
|-
| MF || 10/22/21 || 2000 || bigtip_40um.dxf || Pattern for etching big (40um) tip
|-
| Example || Example || Example || Example || Example
|-
| Example || Example || Example || Example || Example
|}