{"batchcomplete":"","continue":{"rccontinue":"20211201215051|48","continue":"-||"},"query":{"recentchanges":[{"type":"edit","ns":0,"title":"Metal Evaporator","pageid":4,"revid":49,"old_revid":48,"rcid":58,"timestamp":"2022-03-23T15:51:25Z"},{"type":"edit","ns":0,"title":"Metal Evaporator","pageid":4,"revid":48,"old_revid":45,"rcid":57,"timestamp":"2022-01-28T16:44:08Z"},{"type":"edit","ns":0,"title":"EBL","pageid":7,"revid":47,"old_revid":46,"rcid":56,"timestamp":"2022-01-28T16:43:20Z"},{"type":"edit","ns":0,"title":"EBL","pageid":7,"revid":46,"old_revid":33,"rcid":55,"timestamp":"2022-01-21T18:19:37Z"},{"type":"edit","ns":0,"title":"Metal Evaporator","pageid":4,"revid":45,"old_revid":32,"rcid":54,"timestamp":"2022-01-21T18:12:37Z"},{"type":"edit","ns":0,"title":"PECVD","pageid":8,"revid":44,"old_revid":43,"rcid":53,"timestamp":"2021-12-06T16:00:17Z"},{"type":"edit","ns":0,"title":"PECVD","pageid":8,"revid":43,"old_revid":36,"rcid":52,"timestamp":"2021-12-02T22:36:54Z"},{"type":"edit","ns":0,"title":"ALD","pageid":9,"revid":42,"old_revid":41,"rcid":51,"timestamp":"2021-12-02T21:35:13Z"},{"type":"edit","ns":0,"title":"ALD","pageid":9,"revid":41,"old_revid":40,"rcid":50,"timestamp":"2021-12-01T22:05:18Z"},{"type":"edit","ns":0,"title":"ALD","pageid":9,"revid":40,"old_revid":39,"rcid":49,"timestamp":"2021-12-01T21:53:01Z"}]}}