brarlab - User contributions [en]

Metal Evaporator

2022-01-28T16:44:08Z

Gjaffe:

To calculate Iterative Tooling Factor = Used Tooling Factor x ( Measured Thickness / Nominal Thickness) then round to nearest percent.
{| class="wikitable"
|-
! User !! Date !! Source !! Dep Rate (A/s) !! Current (mA) !! Nominal Thickness (nm) !! Measured Thickness (nm)
!Tooling Factor Used (%)
!Iterative Tooling Factor (%)
|-
| MF || 10/27/21 || Au || 1.5 || 145 || 100 ||
|
|
|-
|GH
|11/10/21
|Au (and 2 nm Ti)
|2.0
|67
|122
|123
|77
|78
|-
|GH
|11/10/21
|Hf
|<0.1
|91
|1.5
|
|77
|
|-
|JS
|11/10/21
|Cr/Au/Si
|1/2/2
|14/60/65
|2.5/30/50 (and 80)
|
|77
|
|-
|MF
|11/16/21
|Cr/Au
|0.8/1.9
|13/73
|4/50
|
|77
|
|-
|MF
|11/29/21
|Au
|2.1
|66
|75
|
|77
|
|-
|GJ
|1/19/22
|Cr
|1.0
|12-13
|20
|
|77
|
|-
|GJ
|1/21/22
|Cr
|1.0
|15
|20
|
|77
|
|-
|GJ
|1/28/22
|Cr
|1.0
|17-20
|20
|
|77
|
|}

EBL

2022-01-28T16:43:20Z

Gjaffe:

{| class="wikitable"
|+ Caption text
|-
! User !! Date
!Resist!! Dose (µC/cm<sup>2</sup>) !! Write File !! Picture/Notes
|-
| MF || 10/22/21
| 950 spun at 4000RPM, 60s 180C bake|| 2000 || bigtip_40um.dxf || Pattern for etching big (40um) tip
|-
|MF
|10/29/21
|Bilayer 495/950, 1800RPM, 60s 180C bake
|900
|junctions_200nm.dxf
|200nm break junctions
|-
|MF
|11/2/21
|950 spun at 4000RPM, 60s 180C bake
|2000
|4tips_40um.dxf
|Pattern for etching a big tip (40um) at each corner
|-
|JS
|11/8/21
|950 Spun at 4000 RPM, 90 sec 180 C Bake
|1500-3000
|Aligned_ribbons.dxf
|800 nm bars with 180 nm gaps for aligned BCP
|-
|MF
|11/10/21
|Bilayer 495/950, 1800RPM, 60s 180C bake
|900
|junctions_200nm.dxf
|200nm break junctions
|-
|JS
|11/11/21
|HSiQ: 3000 RPM
|1150
|SiN_40nm_Thermal_Wires
|40 nm wires with 2 micron gaps for SiN thermal steerer
|-
|MF
|11/16/21
|Bilayer 495/950, 1800RPM, 60s 180C bake
|900
|junctionswshorts2.dxf
|200nm break junctions w shorts on one side
|-
|MF
|11/29/21
|Bilayer 495/950, 1800RPM, 60s 180C bake
|900
|junctionswshorts_bottom2c.dxf & junctionswshorts_top1.dxf
|Redo one from 11/16/21
|-
|MF
|11/30/21
|Bilayer 495/950, 1800RPM, 60s 180C bake
|900
|junctionswshorts_bottom2c.dxf & junctionswshorts_top1.dxf
|Redo other from 11/16/21
|-
|GJ
|1/18/22
|Bilayer 495A4/950A4, 4k RPM 60s, 180C bake 90s
|900-1500
|p4720_1x1mm_pec.cel
p5590_1x1mm_pec.cel
|Dose array of 1x1mm thermal emitter patterns on EvapSi/Gr/SiO2/Au/Si
|-
|GJ
|1/20/22
|Bilayer 495A4/950A4, 4k RPM 60s, 180C bake 90s
|1100-1300
|p4720_reduced_1x1mm_pec.cel &
p5580_reduced_1x1mm_pec.cel
|Repeated dose array in smaller range and reduced feature sizes to combat feature blowout
|-
|GJ
|1/27/22
|Bilayer 495A4/950A4, 4k RPM 60s, 180C bake 90s
|1300
|p4720_reduced_4x4mm_pec.cel
|4x4mm thermal emitter pattern on sample MW2 Box 2 D2. Pattern was somehow written shifted by 2mm in x and y
|}

EBL

2022-01-21T18:19:37Z

Gjaffe:

Metal Evaporator

2022-01-21T18:12:37Z

Gjaffe: